AIST: Minimal Fab, Succeeded in Small-scale Integrated Circuit Production-No need for clean room

AIST: Minimal Fab, Succeeded in Small-scale Integrated Circuit Production-No need for clean room

“JAXA”: Low Volume Production System (Minimum Fab)

We are aiming for “realization of integrated circuit manufacturing for space” by the small volume production system (minimal fab) (Fig. 1).

We developed “a device to design integrated circuits (4-bit shift register and I / O circuit) of 1000 transistor scale”. ,

“AIST”: Wiring process technology

Prototype integrated circuit using practical SOI-CMOS two-layer aluminum wiring process technology (Fig. 2 · Technology 2018) (Fig. 3)

The operation of the integrated circuit has been successfully demonstrated (Figure 4).

Integrated circuit designers: manufacture their own integrated circuits

All automatically operate integrated circuits and manufacturing equipment in full auto mode.

In a minimal fab, integrated circuits and designers develop systems that can manufacture integrated circuits by themselves.

JAXA’s circuit designer has succeeded in demonstrating the above integrated circuit by manipulating the minimal fab.

With this success, we have opened the way to manufacture integrated circuits on spacecraft with minimal fabs.