🎇New Canon ‘200 mm wafer option’ for i-line and KrF semiconductor lithography helps meet the demand for IoT and automotive devices.
TOKYO, December 11, 2017—Canon Inc. announced today that the Company has commenced sales of a “200 mm option” for the FPA-5550iZ2 i-line1 and the FPA-6300ES6a KrF2 semiconductor lithography equipment, released in December 2016 and April 2012, respectively.
These two systems are renowned for their ability to mass-produce logic, memory and image sensor devices required for IoT and automotive technologies.
Canon Global