RIKEN: High-Resolution X-Ray Imaging Detector-Resolving 200-nm Structures
High Brightness Research Center (JASRI)
RIKEN Center for Radiation Science Research
Kamijima Chemical Industry
We have successfully developed a high-resolution X-ray imaging detector that can resolve 200 nm (one-billionth of a meter) structures.
This X-ray imaging detector has the highest resolution in the world, enabling you to obtain unprecedented high resolution X-ray images.
SPring-8 home page:
Development of high resolution X-ray imaging detector capable of resolving 200 nm structures
-Realization of nondestructive inspection of electronic devices-SPring-8 Web Site
X-ray imaging detector:
With the world’s highest resolution, you can obtain unprecedented high resolution X-ray images.
If you want to obtain X-ray images in high resolution,
After converting X-rays into visible light with thin-film scintillator [1], a method of magnifying and imaging with a lens is used.
However, until now, the structure and resolution of 500 nm have been considered the limit.
Research group:
We focused on the imaging process after X-rays were converted to visible light, and aimed to dramatically improve resolution.
In particular, we developed a transparent 5 micrometer (μm, μm is one millionth of a meter) thick thin film scintillator without bonding layer, and greatly improved the optical characteristics.
As a result, we have achieved a resolution of 200 nm, which is close to the theoretical limit of X-ray imaging.
In addition, using this performance, we succeeded in imaging a 300-nanometer-wide interconnect inside a very large scale integrated circuit (VLSI) device.
It is the first in the world to “visualize” the internal fine wiring of VLSI with “nondestructive and practical image quality”.
This time result:
The newly developed X-ray image detector makes it easy to obtain high-resolution fluoroscopic images.
In addition to SPring-8 [2] large radiation facilities, practical use is expected in the field of nondestructive inspection of electronic devices using small X-ray sources.
This study was published in the US scientific magazine “Optics Letters” (March 15th).
In addition, it is elected as the editor’s pick of the magazine.
http://www.spring8.or.jp/ja/news_publications/press_release/2019/190315/