Tokyo Institute of Technology: Development of a new MEMS sensor: Detects acceleration 1μG
August 14, 2019
NTT Advanced Technology / Tokyo Institute of Technology
We have developed a MEMS sensor that can detect acceleration 1μG.
A new MEMS acceleration sensor with low noise and high sensitivity.
Features: Performance
Uses a laminated metal structure formed from multiple metal layers.
Compared to sensors of the same size, the noise is less than 1/10 and the sensitivity is more than 100 times.
Application fields:
Medical care
Infrastructure diagnostics,
Mobile control,
Expected to be used with robots.
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