Semiconductor: Development of EUV peripherals: Lasertec, Tokyo Electron
Gigaphoton: Mass production of ArFi light source GT66A: EUV miniaturization
NEC :: Developed superconducting qubit 20 years ago: Received Asahi Prize
Toyota: Superiority of power semiconductor SiC: Adopted by Toyota MIRAI
TSMC and Samsung: EUV peripheral technology procurement: drawing equipment, inspection equipment