Samsung: Challenge to 5nm EUV process: Yield rate is low
Semiconductor: Development of EUV peripherals: Lasertec, Tokyo Electron
TSMC and Samsung: EUV peripheral technology procurement: drawing equipment, inspection equipment
Taiwan TSMC: State-of-the-art microfabrication technology: Compared to China SMIC
ASML: EUV Center opened in Taiwan: EUV lithography