Ministry of Economy, Trade and Industry: Three advanced semiconductor companies selected: Tokyo Electron, Canon, SCREEN

Ministry of Economy, Trade and Industry: Three advanced semiconductor companies selected: Tokyo Electron, Canon, SCREEN

[Tokyo March 24, Reuters]

Ministry of Economy, Trade and Industry:

A company that develops advanced semiconductor manufacturing technology was selected.

Tokyo Electron,
Canon,
SCREEN Semiconductor (Kyoto City),
National Institute of Advanced Industrial Science and Technology,

It was announced on March 23 that it had selected the above four companies.

Overseas foundries:

We will cooperate with overseas foundries (contract manufacturing of semiconductors) such as Taiwan Stacked Circuit Manufacturing (TSMC).

Next-generation semiconductors and
State-of-the-art logic semiconductor development and manufacturing technology

2nm next-generation semiconductor:

In particular,

Developed next-generation semiconductor and manufacturing technology after 2 nm (nanometer).
In addition, we have established manufacturing technology for logic semiconductors with cutting-edge technology not found in Japan.

The research and development period is 5 years.

Taiwan TSMC participates:

Build an “advanced semiconductor manufacturing technology consortium” including overseas foundries that produce semiconductor chips.

Taiwan TSMC, a major semiconductor contract manufacturing company, has decided to establish a subsidiary in Tsukuba for research and development.

Reuters

https://jp.reuters.com/article/meti-semiconductor-idJPKBN2BG0CN

“NEDO”: Post 5G information communication system development / advanced semiconductor manufacturing technology development

-About the decision of the implementation system-

March 23, 2021

“NEDO”:

Related to “Post 5G Information and Communication System Development Business / Development of Advanced Semiconductor Manufacturing Technology”

Conducted the above open call for participants,
Review the proposal and
Determine the planned implementation destination as shown in Document 1.
List of planned implementation destinations: Document 1

Tokyo Electron Limited
SCREEN Semiconductor Solutions
Canon Inc

Development of advanced semiconductor manufacturing technology:

Through the construction of pilot lines, etc.

Among the advanced semiconductor manufacturing processes, we will develop the miniaturization (More Moore) technology of the previous process.

In particular,

Development of technologies required for process nodes and advanced semiconductors after 2 nm.

High-performance exposure and microfabrication technology,
Film formation technology,
Annealing technology,
Etching technology,
Of the cleaning technology, etc.

we will develop manufacturing and process technologies that require new development and significant performance improvement.

Building a pilot line:

Through the construction of the pilot line, we will evaluate and verify the manufacturing equipment using microfabricated actual wafers.

Establish manufacturing technology for logic semiconductors with cutting-edge technology not found in Japan.

Business period
In principle, within 5 years (60 months) from the start of research and development

NEDO

https://www.nedo.go.jp/koubo/IT3_100173.html