Toray: Developed wafer circular coating tech: Slit coater for LCD color filters
November 5, 2019
Toray Engineering:
Developed the basic technology of “Circular application of wafers with Slit coater“.
In the future, we will provide equipment for application tests according to customer requirements (maximum 12-inch wafer: sample prototyping possible).
Slit coater: Wafer coating technology
Slit coater for LCD color filter is our main product.
The only company selling the world’s largest G10.5 size from G2
Deliver over 700 Slit coaters to customers in Japan and overseas
Boasts industry-leading results.
We will expand this slit coater in the semiconductor field where expansion is expected in the future.
We have recently developed a new Slit coater and coating technology.
Major features:
The main features of this slit coater are as follows.
- It can be applied to substrates with various shapes and irregularities including circular shapes.
- The liquid to be applied does not protrude from the substrate, and edge rinse and back rinse are basically unnecessary.
- Compatible with a wide viscosity range (1 to 10,000 mPa · s).
- A wide range of film thickness (Wet1 to several tens of μm) can be applied.
- Compared with existing spin coaters, the liquid usage efficiency is overwhelmingly high (* See the attached table).
About the future:
Discovering process change needs from conventional spin coaters, spray coaters, roll coaters, etc.
We also want to build new production processes with our customers.
https://cs2.toray.co.jp/news/tek/tek_newsrrs01.nsf/0/ECE4CB27E871A631492584A9003234AF