Lasertec: Announced a new product “OPTELICS® HYBRID +”: Hybrid laser microscope
Lasertec: ‘OPTELICS® HYBRID +’
‘OPTELICS® HYBRID +’ was announced as the latest model of hybrid laser microscope.
Fusion of two optical systems, laser confocal and white confocal, realizes high functionality and multi-functionality.
We will exhibit ‘OPTELICS® HYBRID +’ at the “Electro Test Exhibition held at Tokyo Big Sight in January 2020″.
‘OPTELICS® HYBRID +’: Major improvements
hardware:
Long-life LED light source,
Adoption of a Z scale with a resolution of 0.05 nm,
Eight hardware sections have been improved.
software:
“Measurement assist function”,
“AI inspection”,
We developed 10 new softwares.
Importance of microscopy:
Currently, in various fields of various materials,
Semiconductor devices,
metal,
resin,
New materials, etc.
In microscopic observation, “accurate and quick data acquisition and analysis” is an important theme.
Therefore, higher performance and versatility of the equipment are required.
‘OPTELICS® HYBRID +’: Main functions
OPTELICS HYBRID series,
First, a long-life LED light source and a high-resolution Z scale are adopted.
Next, the “measurement assist function” was newly developed.
Primary function: “LM chart”
Advice on the optimal measurement method by setting the measurement method and parameters (conventionally, depending on the experience of the operator)
Second function: “Filter assist function”
This equipment supports pretreatment process / parameters (including noise processing etc.),
Third function: “LM Advisor”
From the measurement information, advise on “management items for distinguishing OK products and NG products”,
“AI Inspection”: Automatic inspection software with machine learning / deep learning. Newly developed “AI inspection”.
Non-pattern board inspection,
Expanded to defect inspection of patterned devices, etc.
You can classify the acquired defects,
The field of activity in the inspection field will expand dramatically.
Automatic transfer of wafers,
High NA objective lens that improves measurement accuracy,
Hardware options such as Xθ stage,
‘OPTELICS® HYBRID +’: field of use
Observation and shape measurement of various materials
Semiconductor materials & devices,
Transparent membrane,
MEMS,
Coating material,
High-performance film,
Inorganic and organic materials,
Metal parts,
Plastic processed parts, etc.
2020 ｜ Topics ｜ Lasertec Corporation