Panasonic:IBM Japan, on semiconductor manufacturing automation:recipe generation system
IBM Japan / Panasonic Smart Factory Solution
Aiming for “OEE (Overall Equipment Effectiveness) and high-quality manufacturing in the semiconductor manufacturing process”.
Agreed to collaborate on new product development to realize automation of semiconductor manufacturing.
IBM Japan:
Utilize knowledge for semiconductor manufacturing processes.
APC (Advanced Process Control),
Data analysis systems such as FDC (Fault Detection and Classification)
Upper layer MES (Manufacturing Execution System)
Development and sales, quality improvement and automation of production management.
Newly developed system:
Plasma dicer recipe automatic generation system
Process control system incorporating an FDC system in the plasma cleaner
Specifically, a new advanced packaging method for semiconductor manufacturing processes: a plasma dicer recipe automatic generation system,
Developed a process control system that incorporates an FDC system into a plasma cleaner that has a proven track record in subsequent processes.
Panasonic Newsroom Japan
https://news.panasonic.com/jp/press/data/2019/10/jn191015-1/jn191015-1.html