University of Hyogo: Japan’s only EUV lithography facility: Synchrotron Radiation NewSubaru
-New injector for NewSubaru, performance improvement-
-Contributing to next-generation semiconductor microfabrication technology-
University of Hyogo:
NewSubaru, a medium-sized synchrotron radiation facility at the University of Hyogo
A new injector has been installed in New Bar.
Published to the press:
University of Hyogo NewSubaru
Since 2000,
Including microfabrication technology for next-generation semiconductors
Engaged in the development of smartphone backbone devices,
It has contributed to speeding up video processing functions and reducing manufacturing costs.
New injector:
It was built last year with the aim of improving the sophistication of NewSubaru.
After three months of adjustment, it will be available from the 20th of this month.
20% improvement in synchrotron radiation intensity:
Using this injector will increase the intensity of the emitted light by 20%.
“We are now able to efficiently respond to advanced issues on the part of companies.”
University of Hyogo:
In the future, We would like to overcome the issue of Japan’s semiconductor hegemony in the world at NewSubaru.
(Sun TV) –Yahoo! News
https://news.yahoo.co.jp/articles/cdc923e37b9fcf6b844601621f6b7c290e5bd90b
University of Hyogo: NewSubaru’s injector newly installed, preview for the press
Effect:
NewSubaru, a medium-sized synchrotron radiation facility owned by the University of Hyogo (started operation in January 2000)
RIKEN:
Large radiation facility “SPring-8”,
With X-ray free electron laser facility “SACLA”
It is a medium-sized synchrotron radiation facility that is located on the same site and has a complementary relationship.
It is also the largest synchrotron radiation facility owned by a Japanese university.
NewSubaru:
It replaces the electron beam that was traditionally supplied by SPring-8.
The maintenance of a dedicated electron beam generator (incident) has been promoted under the SPring-8 accelerator team.
This time, the maintenance of the new injector has been completed and the test run has been completed.
We held a preview for the media before making full-scale use by companies.
NewSubaru Overview:
The soft X-ray field that New Bar is good at.
Suitable for material development and processing centered on light elements such as carbon.
Areas where Japan has a global advantage so far
in particular,
Development of next-generation semiconductor materials and equipment,
Electrode material for next-generation lithium-ion batteries,
In the field of next-generation metal microfabrication
We have contributed to the research and development of the industrial world.
Extreme Ultraviolet Lithography (EUVL) Technology:
Extreme UV lithography (EUVL) for next-generation semiconductor microfabrication technology
EUVL is used in the manufacture of CPUs for smartphones.
From 2020, it has become an indispensable technology for miniaturization of semiconductor circuits.
This microfabrication technology is a technology that reduces the circuit line width of semiconductor chips.
Performance improvements such as speeding up video processing functions,
It contributes to low power consumption and reduction of manufacturing costs.
https://www2.hyogo-c.ed.jp/weblog2/board-bo/wp-content/uploads/2021/
NewSubaru: Important Notice Regarding Facility Use