RIKEN：扫描X射线显微镜新技术：X射线纳米探针扫描仪
-无需移动样品即可以 20 倍的精度进行扫描-
理研
名古屋大学
大阪大学
联合研究组开发了一种新的高精度扫描技术“X射线纳米探针扫描仪”，用于扫描X射线显微镜。
您可以在不移动样品的情况下扫描样品，
几个原子的扫描精度达到 1 纳米，
它达到了传统方法的10到20倍。
X射线纳米探针扫描仪：
纳米分辨率X射线显微镜观察和
用于 X 射线光谱分析的复杂性。
有望为高精度扫描技术做出贡献。
X射线棱镜
反射式 X 射线镜头
X射线棱镜：
“X 射线棱镜”是在 X 射线区域起作用的折射棱镜。
X 射线棱镜以 1/1000 度级别的超小角度弯曲 X 射线的行进方向。
反射式X射线镜头：
结合使用X射线的反射现象收集并形成图像的光学元件“反射X射线透镜”。
反射式 X 射线透镜用于收集薄至 50 纳米的 X 射线并照射样品。
春天 8:
在大型同步辐射设备“Spring 8”的光束线上不移动样品而扫描样品的结果。
可以获得解析 50 纳米最小结构的 X 射线显微镜图像。
常规扫描X射线显微镜：
使用扫描 X 射线显微镜
《X射线探头与样品的相对位置关系》，
需要高精度扫描。
传统上，人们认为很难弯曲 X 射线。
因此，扫描样品而不是X射线的设备已经成为主流。
新开关
(IUCr) Hard X-ray nanoprobe scanner
X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that
the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes.
In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe.
This restriction
has caused severe complications that hinder progress toward achieving ultimate resolution.Here,
a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed.The nanoprobe scanner
combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors.
By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved.
The validity of the concept
was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved.This method is readily applicable
to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources
https://journals.iucr.org/m/issues/2021/05/00/ro5029/index.html